Silicon-Carbide (SiC) Nanocrystal Technology and Characterization and Its Applications in Memory Structures

Colloidal cubic silicon-carbide nanocrystals have been fabricated, characterized, and introduced into metal–insulator–semiconductor and metal–insulator–metal structures based on hafnium oxide layers. The fabricated structures were characterized through the stress-and-sense measurements in terms of d...

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Detalles Bibliográficos
Autores principales: Mazurak, Andrzej, Mroczyński, Robert, Beke, David, Gali, Adam
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7761177/
https://www.ncbi.nlm.nih.gov/pubmed/33260489
http://dx.doi.org/10.3390/nano10122387

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7761177/
https://www.ncbi.nlm.nih.gov/pubmed/33260489
http://dx.doi.org/10.3390/nano10122387

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