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Silicon-Carbide (SiC) Nanocrystal Technology and Characterization and Its Applications in Memory Structures
Colloidal cubic silicon-carbide nanocrystals have been fabricated, characterized, and introduced into metal–insulator–semiconductor and metal–insulator–metal structures based on hafnium oxide layers. The fabricated structures were characterized through the stress-and-sense measurements in terms of d...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7761177/ https://www.ncbi.nlm.nih.gov/pubmed/33260489 http://dx.doi.org/10.3390/nano10122387 |