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Position Estimator Design for a MEMS Top-Drive Electrostatic Rotary Actuator
The capacitance and rotor angle of a MEMS top-drive electrostatic rotary actuator do not have a linear relationship due to the non-ignorable fringe effect and low aspect ratio of the electrodes. Therefore, the position estimation is not as straightforward as that for a comb-drive linear actuator or...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7762984/ https://www.ncbi.nlm.nih.gov/pubmed/33321872 http://dx.doi.org/10.3390/s20247081 |