Cargando…

Position Estimator Design for a MEMS Top-Drive Electrostatic Rotary Actuator

The capacitance and rotor angle of a MEMS top-drive electrostatic rotary actuator do not have a linear relationship due to the non-ignorable fringe effect and low aspect ratio of the electrodes. Therefore, the position estimation is not as straightforward as that for a comb-drive linear actuator or...

Descripción completa

Detalles Bibliográficos
Autores principales:	Woo, Jemin, Hahn, Bongsu, Ahn, Changsun
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7762984/ https://www.ncbi.nlm.nih.gov/pubmed/33321872 http://dx.doi.org/10.3390/s20247081

Ejemplares similares

Design of a Novel MEMS Microgripper with Rotatory Electrostatic Comb-Drive Actuators for Biomedical Applications
por: Velosa-Moncada, Luis A., et al.
Publicado: (2018)

Bifurcation Control of an Electrostatically-Actuated MEMS Actuator with Time-Delay Feedback
por: Li, Lei, et al.
Publicado: (2016)

Stability, Nonlinearity and Reliability of Electrostatically Actuated MEMS Devices
por: Zhang, Wen-Ming, et al.
Publicado: (2007)

Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator
por: Al-Ghamdi, Majed S., et al.
Publicado: (2017)

Miniaturized Rotary Actuators Using Shape Memory Alloy for Insect-Type MEMS Microrobot
por: Saito, Ken, et al.
Publicado: (2016)

A Study on Measurement Variations in Resonant Characteristics of Electrostatically Actuated MEMS Resonators
por: Iqbal, Faisal, et al.
Publicado: (2018)

Design, Fabrication, Testing and Simulation of a Rotary Double Comb Drives Actuated Microgripper
por: Belfiore, Nicola Pio, et al.
Publicado: (2021)

Low-Voltage and High-Reliability RF MEMS Switch with Combined Electrothermal and Electrostatic Actuation
por: Zhu, Yong, et al.
Publicado: (2021)

Reliability of a MEMS Actuator Improved by Spring Corner Designs and Reshaped Driving Waveforms
por: Hsieh, Hsin-Ta, et al.
Publicado: (2007)

On the Lateral Instability Analysis of MEMS Comb-Drive Electrostatic Transducers
por: Truong, Binh Duc, et al.
Publicado: (2019)

An Electret-Augmented Low-Voltage MEMS Electrostatic Out-of-Plane Actuator for Acoustic Transducer Applications
por: Sano, Chikako, et al.
Publicado: (2020)

Static and Dynamic Analysis of Electrostatically Actuated MEMS Shallow Arches for Various Air-Gap Configurations
por: Ouakad, Hassen M., et al.
Publicado: (2021)

Optimal Design of Electromagnetically Actuated MEMS Cantilevers
por: Di Barba, Paolo, et al.
Publicado: (2018)

Electrostatic Comb-Drive Actuator with High In-Plane Translational Velocity
por: Eltagoury, Yomna M., et al.
Publicado: (2016)

Review on the Modeling of Electrostatic MEMS
por: Chuang, Wan-Chun, et al.
Publicado: (2010)

MEMS Actuators for Optical Microendoscopy
por: Qiu, Zhen, et al.
Publicado: (2019)

An Electrostatic MEMS Roll-Pitch Rotation Rate Sensor with In-Plane Drive Mode
por: Khaled, Ahmed, et al.
Publicado: (2022)

Electrostatically actuated encased cantilevers
por: Desbiolles, Benoit X E, et al.
Publicado: (2018)

The Optimal Design of Modulation Angular Rate for MEMS-Based Rotary Semi-SINS
por: Zhang, Jiayu, et al.
Publicado: (2019)

MEMS-actuated metasurface Alvarez lens
por: Han, Zheyi, et al.
Publicado: (2020)

Design and Fabrication of a Novel MEMS Relay with Low Actuation Voltage
por: Li, Hao, et al.
Publicado: (2020)

Correction to: MEMS-actuated metasurface Alvarez lens
por: Han, Zheyi, et al.
Publicado: (2021)

Design and Fabrication of a MEMS Electromagnetic Swing-Type Actuator for Optical Switch
por: Jia, Shuhai, et al.
Publicado: (2021)

Quasi-Static Pull-in: an Instability in Electrostatic Actuators
por: Al-Ghamdi, M. S., et al.
Publicado: (2020)

Strain Engineering of Germanium Nanobeams by Electrostatic Actuation
por: Ayan, Arman, et al.
Publicado: (2019)

Polymer interdigitated pillar electrostatic (PIPE) actuators
por: Ni, Di, et al.
Publicado: (2022)

Design and Fabrication of a Push-Pull Electrostatic Actuated Cantilever Waveguide Scanner
por: Wang, Wei-Chih, et al.
Publicado: (2019)

Temperature Stable Piezoelectric Imprint of Epitaxial Grown PZT for Zero-Bias Driving MEMS Actuator Operation
por: Teuschel, Marco, et al.
Publicado: (2022)

An Improved Passivity-based Control of Electrostatic MEMS Device
por: Ryalat, Mutaz, et al.
Publicado: (2020)

Design and Experimental Research of a Rotary Micro-Actuator Based on a Shearing Piezoelectric Stack
por: Huang, Hehe, et al.
Publicado: (2019)

Design of an Inkjet-Printed Rotary Bellows Actuator and Simulation of its Time-Dependent Deformation Behavior
por: Dämmer, Gabriel, et al.
Publicado: (2021)

Surrogate-based optimization design for surface texture of helical pair in helical hydraulic rotary actuator
por: Liu, Song, et al.
Publicado: (2023)

Visible light–gated reconfigurable rotary actuation of electric nanomotors
por: Liang, Zexi, et al.
Publicado: (2018)

Novel Electrothermal Microgrippers Based on a Rotary Actuator System
por: Vargas-Chable, Pedro, et al.
Publicado: (2022)

Design and Modeling of Polysilicon Electrothermal Actuators for a MEMS Mirror with Low Power Consumption
por: Lara-Castro, Miguel, et al.
Publicado: (2017)

Modeling of MEMS Mirrors Actuated by Phase-Change Mechanism
por: Torres, David, et al.
Publicado: (2017)

Electrothermal Actuators for SiO(2) Photonic MEMS
por: Peters, Tjitte-Jelte, et al.
Publicado: (2016)

Aluminum Nitride Out-of-Plane Piezoelectric MEMS Actuators
por: Rabih, Almur A. S., et al.
Publicado: (2023)

Mechanical Behaviors Research and the Structural Design of a Bipolar Electrostatic Actuation Microbeam Resonator
por: Feng, Jingjing, et al.
Publicado: (2019)

Electrostatic-Fluid-Structure 3D Numerical Simulation of a MEMS Electrostatic Comb Resonator
por: Yu, Zhanqing, et al.
Publicado: (2022)

Cannot write session to /tmp/vufind_sessions/sess_silkb7skh42kj42krmirprp4fr