Catalyst-Less and Transfer-Less Synthesis of Graphene on Si(100) Using Direct Microwave Plasma Enhanced Chemical Vapor Deposition and Protective Enclosures

In this study, graphene was synthesized on the Si(100) substrates via the use of direct microwave plasma-enhanced chemical vapor deposition (PECVD). Protective enclosures were applied to prevent excessive plasma etching of the growing graphene. The properties of synthesized graphene were investigate...

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Detalles Bibliográficos
Autores principales: Gudaitis, Rimantas, Lazauskas, Algirdas, Jankauskas, Šarūnas, Meškinis, Šarūnas
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7763619/
https://www.ncbi.nlm.nih.gov/pubmed/33321771
http://dx.doi.org/10.3390/ma13245630

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7763619/
https://www.ncbi.nlm.nih.gov/pubmed/33321771
http://dx.doi.org/10.3390/ma13245630

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