Sensor for the Characterization of 2D Angular Actuators with Picoradian Resolution and Nanoradian Accuracy with Microradian Range

High precision angular actuators are used for high demanding applications such as laser steering for photolithography. Piezo technology allows developing actuators with a resolution as low as a few nanoradians, with bandwidths as high as several kilohertz. In most demanding applications, the actual...

Descripción completa

Detalles Bibliográficos
Autores principales: Pisani, Marco, Astrua, Milena, Raj, Srijith Bangaru Thirumalai
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Letter
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7763662/
https://www.ncbi.nlm.nih.gov/pubmed/33316894
http://dx.doi.org/10.3390/s20247034

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7763662/
https://www.ncbi.nlm.nih.gov/pubmed/33316894
http://dx.doi.org/10.3390/s20247034

Ejemplares similares