Dominant Loss Mechanisms of Whispering Gallery Mode RF-MEMS Resonators with Wide Frequency Coverage

This work investigates the dominant energy dissipations of the multi-frequency whispering gallery mode (WGM) resonators to provide an insight into the loss mechanisms of the devices. An extensive theory for each loss source was established and experimentally testified. The squeezed film damping (SFD...

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Detalles Bibliográficos
Autores principales: Chen, Zeji, Jia, Qianqian, Liu, Wenli, Yuan, Quan, Zhu, Yinfang, Yang, Jinling, Yang, Fuhua
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7764441/
https://www.ncbi.nlm.nih.gov/pubmed/33302455
http://dx.doi.org/10.3390/s20247017

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7764441/
https://www.ncbi.nlm.nih.gov/pubmed/33302455
http://dx.doi.org/10.3390/s20247017

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