Nonlinear Vibration Study Based on Uncertainty Analysis in MEMS Resonant Accelerometer

This paper aims to develop a resonant accelerometer for high-sensitivity detection and to investigate the nonlinear vibration of the MEMS resonant accelerometer driven by electrostatic comb fingers. First, a nonlinear vibration model of the resonator with comb fingers in a MEMS resonant acceleromete...

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Detalles Bibliográficos
Autores principales: Li, Yan, Song, Linke, Liang, Shuai, Xiao, Yifeng, Yang, Fuling
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7766775/
https://www.ncbi.nlm.nih.gov/pubmed/33339268
http://dx.doi.org/10.3390/s20247207

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7766775/
https://www.ncbi.nlm.nih.gov/pubmed/33339268
http://dx.doi.org/10.3390/s20247207

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