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Nonlinear Vibration Study Based on Uncertainty Analysis in MEMS Resonant Accelerometer
This paper aims to develop a resonant accelerometer for high-sensitivity detection and to investigate the nonlinear vibration of the MEMS resonant accelerometer driven by electrostatic comb fingers. First, a nonlinear vibration model of the resonator with comb fingers in a MEMS resonant acceleromete...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7766775/ https://www.ncbi.nlm.nih.gov/pubmed/33339268 http://dx.doi.org/10.3390/s20247207 |