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Real-time and non-destructive hydrocarbon gas sensing using mid-infrared integrated photonic circuits
A chip-scale mid-infrared (mid-IR) sensor was developed for hydrocarbon gas detection. The sensor consisted of amorphous Si (a-Si) optical ridge waveguides that were fabricated by complementary metal–oxide–semiconductor (CMOS) processes. The waveguide exhibited a sharp fundamental mode through λ = 2...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
The Royal Society of Chemistry
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7793566/ https://www.ncbi.nlm.nih.gov/pubmed/33425327 http://dx.doi.org/10.1039/c9ra10058j |