Ion tracks in silicon formed by much lower energy deposition than the track formation threshold

Damaged regions of cylindrical shapes called ion tracks, typically in nano-meters wide and tens micro-meters long, are formed along the ion trajectories in many insulators, when high energy ions in the electronic stopping regime are injected. In most cases, the ion tracks were assumed as consequence...

Descripción completa

Detalles Bibliográficos
Autores principales: Amekura, H., Toulemonde, M., Narumi, K., Li, R., Chiba, A., Hirano, Y., Yamada, K., Yamamoto, S., Ishikawa, N., Okubo, N., Saitoh, Y.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7794553/
https://www.ncbi.nlm.nih.gov/pubmed/33420182
http://dx.doi.org/10.1038/s41598-020-80360-8

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7794553/
https://www.ncbi.nlm.nih.gov/pubmed/33420182
http://dx.doi.org/10.1038/s41598-020-80360-8

Ejemplares similares