A Thermopile Device with Sub-Wavelength Hole Arrays by CMOS-MEMS Technology

A thermopile device with sub-wavelength hole array (SHA) is numerically and experimentally investigated. The infrared absorbance (IRA) effect of SHAs in active area of the thermopile device is clearly analyzed by the finite-difference time-domain (FDTD) method. The prototypes are manufactured by the...

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Detalles Bibliográficos
Autores principales: Chen, Chi-Feng, Shen, Chih-Hsiung, Yeh, Yun-Ying
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7795074/
https://www.ncbi.nlm.nih.gov/pubmed/33383920
http://dx.doi.org/10.3390/s21010180

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7795074/
https://www.ncbi.nlm.nih.gov/pubmed/33383920
http://dx.doi.org/10.3390/s21010180

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