A Laterally Vibrating Lithium Niobate MEMS Resonator Array Operating at 500 °C in Air

This paper reports the high-temperature characteristics of a laterally vibrating piezoelectric lithium niobate (LiNbO(3); LN) MEMS resonator array up to 500 °C in air. After a high-temperature burn-in treatment, device quality factor (Q) was enhanced to 508 and the resonance shifted to a lower frequ...

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Detalles Bibliográficos
Autores principales: Eisner, Savannah R., Chapin, Cailin A., Lu, Ruochen, Yang, Yansong, Gong, Songbin, Senesky, Debbie G.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Letter
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7795216/
https://www.ncbi.nlm.nih.gov/pubmed/33383685
http://dx.doi.org/10.3390/s21010149

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7795216/
https://www.ncbi.nlm.nih.gov/pubmed/33383685
http://dx.doi.org/10.3390/s21010149

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