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A Laterally Vibrating Lithium Niobate MEMS Resonator Array Operating at 500 °C in Air
This paper reports the high-temperature characteristics of a laterally vibrating piezoelectric lithium niobate (LiNbO(3); LN) MEMS resonator array up to 500 °C in air. After a high-temperature burn-in treatment, device quality factor (Q) was enhanced to 508 and the resonance shifted to a lower frequ...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7795216/ https://www.ncbi.nlm.nih.gov/pubmed/33383685 http://dx.doi.org/10.3390/s21010149 |