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Aluminum doped zinc oxide deposited by atomic layer deposition and its applications to micro/nano devices
This work reports investigation on the deposition and evaluation of an aluminum-doped zinc oxide (AZO) thin film and its novel applications to micro- and nano-devices. The AZO thin film is deposited successfully by atomic layer deposition (ALD). 50 nm-thick AZO film with high uniformity is checked b...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7806672/ https://www.ncbi.nlm.nih.gov/pubmed/33441961 http://dx.doi.org/10.1038/s41598-020-80880-3 |