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Aluminum doped zinc oxide deposited by atomic layer deposition and its applications to micro/nano devices

This work reports investigation on the deposition and evaluation of an aluminum-doped zinc oxide (AZO) thin film and its novel applications to micro- and nano-devices. The AZO thin film is deposited successfully by atomic layer deposition (ALD). 50 nm-thick AZO film with high uniformity is checked b...

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Detalles Bibliográficos
Autores principales:	Van Toan, Nguyen, Tuoi, Truong Thi Kim, Inomata, Naoki, Toda, Masaya, Ono, Takahito
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7806672/ https://www.ncbi.nlm.nih.gov/pubmed/33441961 http://dx.doi.org/10.1038/s41598-020-80880-3

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