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The LaserFIB: new application opportunities combining a high-performance FIB-SEM with femtosecond laser processing in an integrated second chamber
The development of the femtosecond laser (fs laser) with its ability to provide extremely rapid athermal ablation of materials has initiated a renaissance in materials science. Sample milling rates for the fs laser are orders of magnitude greater than that of traditional focused ion beam (FIB) sourc...
Autores principales: | , , , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer Singapore
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7818346/ https://www.ncbi.nlm.nih.gov/pubmed/33580462 http://dx.doi.org/10.1186/s42649-020-00044-5 |
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author | Tordoff, Ben Hartfield, Cheryl Holwell, Andrew J. Hiller, Stephan Kaestner, Marcus Kelly, Stephen Lee, Jaehan Müller, Sascha Perez-Willard, Fabian Volkenandt, Tobias White, Robin Rodgers, Thomas |
author_facet | Tordoff, Ben Hartfield, Cheryl Holwell, Andrew J. Hiller, Stephan Kaestner, Marcus Kelly, Stephen Lee, Jaehan Müller, Sascha Perez-Willard, Fabian Volkenandt, Tobias White, Robin Rodgers, Thomas |
author_sort | Tordoff, Ben |
collection | PubMed |
description | The development of the femtosecond laser (fs laser) with its ability to provide extremely rapid athermal ablation of materials has initiated a renaissance in materials science. Sample milling rates for the fs laser are orders of magnitude greater than that of traditional focused ion beam (FIB) sources currently used. In combination with minimal surface post-processing requirements, this technology is proving to be a game changer for materials research. The development of a femtosecond laser attached to a focused ion beam scanning electron microscope (LaserFIB) enables numerous new capabilities, including access to deeply buried structures as well as the production of extremely large trenches, cross sections, pillars and TEM H-bars, all while preserving microstructure and avoiding or reducing FIB polishing. Several high impact applications are now possible due to this technology in the fields of crystallography, electronics, mechanical engineering, battery research and materials sample preparation. This review article summarizes the current opportunities for this new technology focusing on the materials science megatrends of engineering materials, energy materials and electronics. |
format | Online Article Text |
id | pubmed-7818346 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2020 |
publisher | Springer Singapore |
record_format | MEDLINE/PubMed |
spelling | pubmed-78183462021-02-10 The LaserFIB: new application opportunities combining a high-performance FIB-SEM with femtosecond laser processing in an integrated second chamber Tordoff, Ben Hartfield, Cheryl Holwell, Andrew J. Hiller, Stephan Kaestner, Marcus Kelly, Stephen Lee, Jaehan Müller, Sascha Perez-Willard, Fabian Volkenandt, Tobias White, Robin Rodgers, Thomas Appl Microsc Review The development of the femtosecond laser (fs laser) with its ability to provide extremely rapid athermal ablation of materials has initiated a renaissance in materials science. Sample milling rates for the fs laser are orders of magnitude greater than that of traditional focused ion beam (FIB) sources currently used. In combination with minimal surface post-processing requirements, this technology is proving to be a game changer for materials research. The development of a femtosecond laser attached to a focused ion beam scanning electron microscope (LaserFIB) enables numerous new capabilities, including access to deeply buried structures as well as the production of extremely large trenches, cross sections, pillars and TEM H-bars, all while preserving microstructure and avoiding or reducing FIB polishing. Several high impact applications are now possible due to this technology in the fields of crystallography, electronics, mechanical engineering, battery research and materials sample preparation. This review article summarizes the current opportunities for this new technology focusing on the materials science megatrends of engineering materials, energy materials and electronics. Springer Singapore 2020-10-26 /pmc/articles/PMC7818346/ /pubmed/33580462 http://dx.doi.org/10.1186/s42649-020-00044-5 Text en © The Author(s) 2020 Open AccessThis article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article's Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article's Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/. |
spellingShingle | Review Tordoff, Ben Hartfield, Cheryl Holwell, Andrew J. Hiller, Stephan Kaestner, Marcus Kelly, Stephen Lee, Jaehan Müller, Sascha Perez-Willard, Fabian Volkenandt, Tobias White, Robin Rodgers, Thomas The LaserFIB: new application opportunities combining a high-performance FIB-SEM with femtosecond laser processing in an integrated second chamber |
title | The LaserFIB: new application opportunities combining a high-performance FIB-SEM with femtosecond laser processing in an integrated second chamber |
title_full | The LaserFIB: new application opportunities combining a high-performance FIB-SEM with femtosecond laser processing in an integrated second chamber |
title_fullStr | The LaserFIB: new application opportunities combining a high-performance FIB-SEM with femtosecond laser processing in an integrated second chamber |
title_full_unstemmed | The LaserFIB: new application opportunities combining a high-performance FIB-SEM with femtosecond laser processing in an integrated second chamber |
title_short | The LaserFIB: new application opportunities combining a high-performance FIB-SEM with femtosecond laser processing in an integrated second chamber |
title_sort | laserfib: new application opportunities combining a high-performance fib-sem with femtosecond laser processing in an integrated second chamber |
topic | Review |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7818346/ https://www.ncbi.nlm.nih.gov/pubmed/33580462 http://dx.doi.org/10.1186/s42649-020-00044-5 |
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