Fabrication and Characterization of Black GaAs Nanoarrays via ICP Etching

GaAs nanostructures have attracted more and more attention due to its excellent properties such as increasing photon absorption. The fabrication process on GaAs substrate was rarely reported, and most of the preparation processes are complex. Here, we report a black GaAs fabrication process using a...

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Detalles Bibliográficos
Autores principales: Ma, Jing, Zhao, Yongqiang, Liu, Wen, Song, Peishuai, Yang, Liangliang, Wei, Jiangtao, Yang, Fuhua, Wang, Xiaodong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2021
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7818367/
https://www.ncbi.nlm.nih.gov/pubmed/33475898
http://dx.doi.org/10.1186/s11671-021-03479-1

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7818367/
https://www.ncbi.nlm.nih.gov/pubmed/33475898
http://dx.doi.org/10.1186/s11671-021-03479-1

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