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Fabrication and Characterization of Black GaAs Nanoarrays via ICP Etching
GaAs nanostructures have attracted more and more attention due to its excellent properties such as increasing photon absorption. The fabrication process on GaAs substrate was rarely reported, and most of the preparation processes are complex. Here, we report a black GaAs fabrication process using a...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer US
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7818367/ https://www.ncbi.nlm.nih.gov/pubmed/33475898 http://dx.doi.org/10.1186/s11671-021-03479-1 |