Method of Ga removal from a specimen on a microelectromechanical system-based chip for in-situ transmission electron microscopy

In-situ transmission electron microscopy (TEM) holders that employ a chip-type specimen stage have been widely utilized in recent years. The specimen on the microelectromechanical system (MEMS)-based chip is commonly prepared by focused ion beam (FIB) milling and ex-situ lift-out (EXLO). However, th...

Descripción completa

Detalles Bibliográficos
Autores principales: Kwon, Yena, An, Byeong-Seon, Shin, Yeon-Ju, Yang, Cheol-Woong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer Singapore 2020
Materias:
Technical Report
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7818376/
https://www.ncbi.nlm.nih.gov/pubmed/33580423
http://dx.doi.org/10.1186/s42649-020-00043-6

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7818376/
https://www.ncbi.nlm.nih.gov/pubmed/33580423
http://dx.doi.org/10.1186/s42649-020-00043-6

Ejemplares similares