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Method of Ga removal from a specimen on a microelectromechanical system-based chip for in-situ transmission electron microscopy
In-situ transmission electron microscopy (TEM) holders that employ a chip-type specimen stage have been widely utilized in recent years. The specimen on the microelectromechanical system (MEMS)-based chip is commonly prepared by focused ion beam (FIB) milling and ex-situ lift-out (EXLO). However, th...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer Singapore
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7818376/ https://www.ncbi.nlm.nih.gov/pubmed/33580423 http://dx.doi.org/10.1186/s42649-020-00043-6 |