Analysis of Frequency Drift of Silicon MEMS Resonator with Temperature

High-quality-factor Micro-Electro-Mechanical System (MEMS) resonators have been widely used in sensors and actuators to obtain great mechanical sensitivity. The frequency drift of resonator with temperature is a problem encountered practically. The paper focuses on the resonator frequency distributi...

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Detalles Bibliográficos
Autores principales: Jiang, Bo, Huang, Shenhu, Zhang, Jing, Su, Yan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7823883/
https://www.ncbi.nlm.nih.gov/pubmed/33383860
http://dx.doi.org/10.3390/mi12010026

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7823883/
https://www.ncbi.nlm.nih.gov/pubmed/33383860
http://dx.doi.org/10.3390/mi12010026

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