Formation of a Complex Topologies of SAW-Based Inertial Sensors by Laser Thin Film Local Evaporation

Originally, sensors based on surface acoustic waves are fabricated using photolithography, which becomes extremely expensive when a small series or even single elements are needed for the research. A laser thin film local evaporation technique is proposed to substitute the photolithography process i...

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Detalles Bibliográficos
Autores principales: Kukaev, Alexander, Lukyanov, Dmitry, Mikhailenko, Denis, Safronov, Daniil, Shevchenko, Sergey, Venediktov, Vladimir, Vlasov, Andrey
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7824206/
https://www.ncbi.nlm.nih.gov/pubmed/33374378
http://dx.doi.org/10.3390/mi12010010

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7824206/
https://www.ncbi.nlm.nih.gov/pubmed/33374378
http://dx.doi.org/10.3390/mi12010010

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