Cargando…
Formation of a Complex Topologies of SAW-Based Inertial Sensors by Laser Thin Film Local Evaporation
Originally, sensors based on surface acoustic waves are fabricated using photolithography, which becomes extremely expensive when a small series or even single elements are needed for the research. A laser thin film local evaporation technique is proposed to substitute the photolithography process i...
| Autores principales: | , , , , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7824206/ https://www.ncbi.nlm.nih.gov/pubmed/33374378 http://dx.doi.org/10.3390/mi12010010 |