Built-In Self-Test (BIST) Methods for MEMS: A Review

A novel taxonomy of built-in self-test (BIST) methods is presented for the testing of micro-electro-mechanical systems (MEMS). With MEMS testing representing 50% of the total costs of the end product, BIST solutions that are cost-effective, non-intrusive and able to operate non-intrusively during sy...

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Detalles Bibliográficos
Autores principales: Hantos, Gergely, Flynn, David, Desmulliez, Marc P. Y.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7824590/
https://www.ncbi.nlm.nih.gov/pubmed/33396351
http://dx.doi.org/10.3390/mi12010040

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7824590/
https://www.ncbi.nlm.nih.gov/pubmed/33396351
http://dx.doi.org/10.3390/mi12010040

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