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Built-In Self-Test (BIST) Methods for MEMS: A Review
A novel taxonomy of built-in self-test (BIST) methods is presented for the testing of micro-electro-mechanical systems (MEMS). With MEMS testing representing 50% of the total costs of the end product, BIST solutions that are cost-effective, non-intrusive and able to operate non-intrusively during sy...
Autores principales: | Hantos, Gergely, Flynn, David, Desmulliez, Marc P. Y. |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7824590/ https://www.ncbi.nlm.nih.gov/pubmed/33396351 http://dx.doi.org/10.3390/mi12010040 |
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