Design and Fabrication of Bulk Micromachined 4H-SiC Piezoresistive Pressure Chips Based on Femtosecond Laser Technology

Silicon carbide (SiC) has promising potential for pressure sensing in a high temperature and harsh environment due to its outstanding material properties. In this work, a 4H-SiC piezoresistive pressure chip fabricated based on femtosecond laser technology was proposed. A 1030 nm, 200 fs Yb: KGW lase...

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Detalles Bibliográficos
Autores principales: Wang, Lukang, Zhao, You, Zhao, Yulong, Yang, Yu, Gong, Taobo, Hao, Le, Ren, Wei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7825030/
https://www.ncbi.nlm.nih.gov/pubmed/33418919
http://dx.doi.org/10.3390/mi12010056

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7825030/
https://www.ncbi.nlm.nih.gov/pubmed/33418919
http://dx.doi.org/10.3390/mi12010056

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