Analysis of Parametric and Subharmonic Excitation in Push-Pull Driven Disk Resonator Gyroscopes

For micro-electromechanical system (MEMS) resonators, once the devices are fabricated and packaged, their intrinsic quality factors (Q) will be fixed and cannot be changed, which seriously limits the further improvement of the resonator’s performance. In this paper, parametric excitation is applied...

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Detalles Bibliográficos
Autores principales: Wu, Kai, Lu, Kuo, Li, Qingsong, Zhang, Yongmeng, Zhuo, Ming, Yu, Sheng, Wu, Xuezhong, Xiao, Dingbang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7825520/
https://www.ncbi.nlm.nih.gov/pubmed/33419169
http://dx.doi.org/10.3390/mi12010061

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7825520/
https://www.ncbi.nlm.nih.gov/pubmed/33419169
http://dx.doi.org/10.3390/mi12010061

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