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Analysis of Parametric and Subharmonic Excitation in Push-Pull Driven Disk Resonator Gyroscopes
For micro-electromechanical system (MEMS) resonators, once the devices are fabricated and packaged, their intrinsic quality factors (Q) will be fixed and cannot be changed, which seriously limits the further improvement of the resonator’s performance. In this paper, parametric excitation is applied...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7825520/ https://www.ncbi.nlm.nih.gov/pubmed/33419169 http://dx.doi.org/10.3390/mi12010061 |