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Dynamic Modeling and Anti-Disturbing Control of an Electromagnetic MEMS Torsional Micromirror Considering External Vibrations in Vehicular LiDAR
Micromirrors based on micro-electro-mechanical systems (MEMS) technology are widely employed in different areas, such as optical switching and medical scan imaging. As the key component of MEMS LiDAR, electromagnetic MEMS torsional micromirrors have the advantages of small size, a simple structure,...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7826558/ https://www.ncbi.nlm.nih.gov/pubmed/33435401 http://dx.doi.org/10.3390/mi12010069 |