Dynamic Modeling and Anti-Disturbing Control of an Electromagnetic MEMS Torsional Micromirror Considering External Vibrations in Vehicular LiDAR

Micromirrors based on micro-electro-mechanical systems (MEMS) technology are widely employed in different areas, such as optical switching and medical scan imaging. As the key component of MEMS LiDAR, electromagnetic MEMS torsional micromirrors have the advantages of small size, a simple structure,...

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Detalles Bibliográficos
Autores principales: Hua, Yong, Wang, Shuangyuan, Li, Bingchu, Bai, Guozhen, Zhang, Pengju
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7826558/
https://www.ncbi.nlm.nih.gov/pubmed/33435401
http://dx.doi.org/10.3390/mi12010069

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7826558/
https://www.ncbi.nlm.nih.gov/pubmed/33435401
http://dx.doi.org/10.3390/mi12010069

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