A Novel Tri-Axial Piezoelectric MEMS Accelerometer with Folded Beams

Microelectromechanical (MEMS) piezoelectric accelerometers are diversely used in consumer electronics and handheld devices due to their low power consumption as well as simple reading circuit and good dynamic performance. In this paper, a tri-axial piezoelectric accelerometer with folded beams is pr...

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Detalles Bibliográficos
Autores principales: Liu, Yan, Hu, Bohao, Cai, Yao, Liu, Wenjuan, Tovstopyat, Alexander, Sun, Chengliang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Letter
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7826644/
https://www.ncbi.nlm.nih.gov/pubmed/33440659
http://dx.doi.org/10.3390/s21020453

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7826644/
https://www.ncbi.nlm.nih.gov/pubmed/33440659
http://dx.doi.org/10.3390/s21020453

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