Double-Deck Metal Solenoids 3D Integrated in Silicon Wafer for Kinetic Energy Harvester

A silicon-chip based double-deck three-dimensional (3D) solenoidal electromagnetic (EM) kinetic energy harvester is developed to convert low-frequency (<100 Hz) vibrational energy into electricity with high efficiency. With wafer-level micro electro mechanical systems (MEMS) fabrication to form a...

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Detalles Bibliográficos
Autores principales: Wang, Nianying, Han, Ruofeng, Chen, Changnan, Gu, Jiebin, Li, Xinxin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7828048/
https://www.ncbi.nlm.nih.gov/pubmed/33445444
http://dx.doi.org/10.3390/mi12010074

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7828048/
https://www.ncbi.nlm.nih.gov/pubmed/33445444
http://dx.doi.org/10.3390/mi12010074

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