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A Tunable-Gain Transimpedance Amplifier for CMOS-MEMS Resonators Characterization

CMOS-MEMS resonators have become a promising solution thanks to their miniaturization and on-chip integration capabilities. However, using a CMOS technology to fabricate microelectromechanical system (MEMS) devices limits the electromechanical performance otherwise achieved by specific technologies,...

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Detalles Bibliográficos
Autores principales: Perelló-Roig, Rafel, Verd, Jaume, Bota, Sebastià, Segura, Jaume
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7830080/
https://www.ncbi.nlm.nih.gov/pubmed/33467477
http://dx.doi.org/10.3390/mi12010082