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A Tunable-Gain Transimpedance Amplifier for CMOS-MEMS Resonators Characterization
CMOS-MEMS resonators have become a promising solution thanks to their miniaturization and on-chip integration capabilities. However, using a CMOS technology to fabricate microelectromechanical system (MEMS) devices limits the electromechanical performance otherwise achieved by specific technologies,...
Autores principales: | Perelló-Roig, Rafel, Verd, Jaume, Bota, Sebastià, Segura, Jaume |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7830080/ https://www.ncbi.nlm.nih.gov/pubmed/33467477 http://dx.doi.org/10.3390/mi12010082 |
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