Unusual Dependence of the Diamond Growth Rate on the Methane Concentration in the Hot Filament Chemical Vapor Deposition Process

Although the growth rate of diamond increased with increasing methane concentration at the filament temperature of 2100 °C during a hot filament chemical vapor deposition (HFCVD), it decreased with increasing methane concentration from 1% CH(4) –99% H(2) to 3% CH(4) –97% H(2) at 1900 °C. We investig...

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Detalles Bibliográficos
Autores principales: Song, Byeong-Kwan, Kim, Hwan-Young, Kim, Kun-Su, Yang, Jeong-Woo, Hwang, Nong-Moon
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7830984/
https://www.ncbi.nlm.nih.gov/pubmed/33467140
http://dx.doi.org/10.3390/ma14020426

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7830984/
https://www.ncbi.nlm.nih.gov/pubmed/33467140
http://dx.doi.org/10.3390/ma14020426

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