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Unusual Dependence of the Diamond Growth Rate on the Methane Concentration in the Hot Filament Chemical Vapor Deposition Process

Although the growth rate of diamond increased with increasing methane concentration at the filament temperature of 2100 °C during a hot filament chemical vapor deposition (HFCVD), it decreased with increasing methane concentration from 1% CH(4) –99% H(2) to 3% CH(4) –97% H(2) at 1900 °C. We investig...

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Autores principales: Song, Byeong-Kwan, Kim, Hwan-Young, Kim, Kun-Su, Yang, Jeong-Woo, Hwang, Nong-Moon
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7830984/
https://www.ncbi.nlm.nih.gov/pubmed/33467140
http://dx.doi.org/10.3390/ma14020426
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author Song, Byeong-Kwan
Kim, Hwan-Young
Kim, Kun-Su
Yang, Jeong-Woo
Hwang, Nong-Moon
author_facet Song, Byeong-Kwan
Kim, Hwan-Young
Kim, Kun-Su
Yang, Jeong-Woo
Hwang, Nong-Moon
author_sort Song, Byeong-Kwan
collection PubMed
description Although the growth rate of diamond increased with increasing methane concentration at the filament temperature of 2100 °C during a hot filament chemical vapor deposition (HFCVD), it decreased with increasing methane concentration from 1% CH(4) –99% H(2) to 3% CH(4) –97% H(2) at 1900 °C. We investigated this unusual dependence of the growth rate on the methane concentration, which might give insight into the growth mechanism of a diamond. One possibility would be that the high methane concentration increases the non-diamond phase, which is then etched faster by atomic hydrogen, resulting in a decrease in the growth rate with increasing methane concentration. At 3% CH(4) –97% H(2), the graphite was coated on the hot filament both at 1900 °C and 2100 °C. The graphite coating on the filament decreased the number of electrons emitted from the hot filament. The electron emission at 3% CH(4) –97% H(2) was 13 times less than that at 1% CH(4) –99% H(2) at the filament temperature of 1900 °C. The lower number of electrons at 3% CH(4) –97% H(2) was attributed to the formation of the non-diamond phase, which etched faster than diamond, resulting in a lower growth rate.
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spelling pubmed-78309842021-01-26 Unusual Dependence of the Diamond Growth Rate on the Methane Concentration in the Hot Filament Chemical Vapor Deposition Process Song, Byeong-Kwan Kim, Hwan-Young Kim, Kun-Su Yang, Jeong-Woo Hwang, Nong-Moon Materials (Basel) Article Although the growth rate of diamond increased with increasing methane concentration at the filament temperature of 2100 °C during a hot filament chemical vapor deposition (HFCVD), it decreased with increasing methane concentration from 1% CH(4) –99% H(2) to 3% CH(4) –97% H(2) at 1900 °C. We investigated this unusual dependence of the growth rate on the methane concentration, which might give insight into the growth mechanism of a diamond. One possibility would be that the high methane concentration increases the non-diamond phase, which is then etched faster by atomic hydrogen, resulting in a decrease in the growth rate with increasing methane concentration. At 3% CH(4) –97% H(2), the graphite was coated on the hot filament both at 1900 °C and 2100 °C. The graphite coating on the filament decreased the number of electrons emitted from the hot filament. The electron emission at 3% CH(4) –97% H(2) was 13 times less than that at 1% CH(4) –99% H(2) at the filament temperature of 1900 °C. The lower number of electrons at 3% CH(4) –97% H(2) was attributed to the formation of the non-diamond phase, which etched faster than diamond, resulting in a lower growth rate. MDPI 2021-01-16 /pmc/articles/PMC7830984/ /pubmed/33467140 http://dx.doi.org/10.3390/ma14020426 Text en © 2021 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Song, Byeong-Kwan
Kim, Hwan-Young
Kim, Kun-Su
Yang, Jeong-Woo
Hwang, Nong-Moon
Unusual Dependence of the Diamond Growth Rate on the Methane Concentration in the Hot Filament Chemical Vapor Deposition Process
title Unusual Dependence of the Diamond Growth Rate on the Methane Concentration in the Hot Filament Chemical Vapor Deposition Process
title_full Unusual Dependence of the Diamond Growth Rate on the Methane Concentration in the Hot Filament Chemical Vapor Deposition Process
title_fullStr Unusual Dependence of the Diamond Growth Rate on the Methane Concentration in the Hot Filament Chemical Vapor Deposition Process
title_full_unstemmed Unusual Dependence of the Diamond Growth Rate on the Methane Concentration in the Hot Filament Chemical Vapor Deposition Process
title_short Unusual Dependence of the Diamond Growth Rate on the Methane Concentration in the Hot Filament Chemical Vapor Deposition Process
title_sort unusual dependence of the diamond growth rate on the methane concentration in the hot filament chemical vapor deposition process
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7830984/
https://www.ncbi.nlm.nih.gov/pubmed/33467140
http://dx.doi.org/10.3390/ma14020426
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