Surface Texturing of Si with Periodically Arrayed Oblique Nanopillars to Achieve Antireflection

Si surfaces were texturized with periodically arrayed oblique nanopillars using slanted plasma etching, and their optical reflectance was measured. The weighted mean reflectance (R(w)) of the nanopillar-arrayed Si substrate decreased monotonically with increasing angles of the nanopillars. This may...

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Detalles Bibliográficos
Autores principales: Kim, Jun-Hyun, You, Sanghyun, Kim, Chang-Koo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7830988/
https://www.ncbi.nlm.nih.gov/pubmed/33466751
http://dx.doi.org/10.3390/ma14020380

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7830988/
https://www.ncbi.nlm.nih.gov/pubmed/33466751
http://dx.doi.org/10.3390/ma14020380

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