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Surface Texturing of Si with Periodically Arrayed Oblique Nanopillars to Achieve Antireflection
Si surfaces were texturized with periodically arrayed oblique nanopillars using slanted plasma etching, and their optical reflectance was measured. The weighted mean reflectance (R(w)) of the nanopillar-arrayed Si substrate decreased monotonically with increasing angles of the nanopillars. This may...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7830988/ https://www.ncbi.nlm.nih.gov/pubmed/33466751 http://dx.doi.org/10.3390/ma14020380 |