A Microvalve Module with High Chemical Inertness and Embedded Flow Heating for Microscale Gas Chromatography

This paper reports a multi-valve module with high chemical inertness and embedded flow heating for microscale gas chromatography (µGC) systems. The multi-valve module incorporates a monolithically microfabricated die stack, polyimide valve membranes, and solenoid actuators. The design incorporates t...

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Detalles Bibliográficos
Autores principales: Lu, Hsueh-Tsung, Qin, Yutao, Gianchandani, Yogesh
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7831052/
https://www.ncbi.nlm.nih.gov/pubmed/33477497
http://dx.doi.org/10.3390/s21020632

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7831052/
https://www.ncbi.nlm.nih.gov/pubmed/33477497
http://dx.doi.org/10.3390/s21020632

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