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A Microvalve Module with High Chemical Inertness and Embedded Flow Heating for Microscale Gas Chromatography
This paper reports a multi-valve module with high chemical inertness and embedded flow heating for microscale gas chromatography (µGC) systems. The multi-valve module incorporates a monolithically microfabricated die stack, polyimide valve membranes, and solenoid actuators. The design incorporates t...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7831052/ https://www.ncbi.nlm.nih.gov/pubmed/33477497 http://dx.doi.org/10.3390/s21020632 |