A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into a...

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Detalles Bibliográficos
Autores principales: Algamili, Abdullah Saleh, Khir, Mohd Haris Md., Dennis, John Ojur, Ahmed, Abdelaziz Yousif, Alabsi, Sami Sultan, Ba Hashwan, Saeed Salem, Junaid, Mohammed M.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2021
Materias:
Nano Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7838232/
https://www.ncbi.nlm.nih.gov/pubmed/33496852
http://dx.doi.org/10.1186/s11671-021-03481-7

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7838232/
https://www.ncbi.nlm.nih.gov/pubmed/33496852
http://dx.doi.org/10.1186/s11671-021-03481-7

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