Hermeticity Analysis on SiC Cavity Structure for All-SiC Piezoresistive Pressure Sensor

The hermeticity performance of the cavity structure has an impact on the long-term stability of absolute pressure sensors for high temperature applications. In this paper, a bare silicon carbide (SiC) wafer was bonded to a patterned SiC substrate with shallow grooves based on a room temperature dire...

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Detalles Bibliográficos
Autores principales: Tian, Baohua, Shang, Haiping, Zhao, Lihuan, Wang, Dahai, Liu, Yang, Wang, Weibing
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Letter
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7838917/
https://www.ncbi.nlm.nih.gov/pubmed/33430417
http://dx.doi.org/10.3390/s21020379

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7838917/
https://www.ncbi.nlm.nih.gov/pubmed/33430417
http://dx.doi.org/10.3390/s21020379

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