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Theoretical and experimental revision of surface acoustic waves on the (100) plane of silicon
The phase velocity dispersion of the surface acoustic waves on a basal plane of Si(100) has been calculated in the whole range of the azimuthal angle of propagation. We present a detailed description of the calculations. These calculations are compared with the experimental data obtained by a laser...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7854651/ https://www.ncbi.nlm.nih.gov/pubmed/33531555 http://dx.doi.org/10.1038/s41598-021-82211-6 |