MEMS-Based Electrochemical Seismometer Relying on a CAC Integrated Three-Electrode Structure

This study developed a MEMS-based electrochemical seismometer relying on a cathode–anode–cathode (CAC) integrated three-electrode structure where two cathodes were positioned on two surfaces of a silicon wafer, while one anode was positioned on the sidewalls of the through holes of the silicon wafer...

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Detalles Bibliográficos
Autores principales: She, Xu, Wang, Junbo, Chen, Deyong, Chen, Jian, Xu, Chao, Qi, Wenjie, Liu, Bowen, Liang, Tian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7865234/
https://www.ncbi.nlm.nih.gov/pubmed/33530375
http://dx.doi.org/10.3390/s21030809

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7865234/
https://www.ncbi.nlm.nih.gov/pubmed/33530375
http://dx.doi.org/10.3390/s21030809

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