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MEMS-Based Electrochemical Seismometer Relying on a CAC Integrated Three-Electrode Structure
This study developed a MEMS-based electrochemical seismometer relying on a cathode–anode–cathode (CAC) integrated three-electrode structure where two cathodes were positioned on two surfaces of a silicon wafer, while one anode was positioned on the sidewalls of the through holes of the silicon wafer...
Autores principales: | , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7865234/ https://www.ncbi.nlm.nih.gov/pubmed/33530375 http://dx.doi.org/10.3390/s21030809 |
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author | She, Xu Wang, Junbo Chen, Deyong Chen, Jian Xu, Chao Qi, Wenjie Liu, Bowen Liang, Tian |
author_facet | She, Xu Wang, Junbo Chen, Deyong Chen, Jian Xu, Chao Qi, Wenjie Liu, Bowen Liang, Tian |
author_sort | She, Xu |
collection | PubMed |
description | This study developed a MEMS-based electrochemical seismometer relying on a cathode–anode–cathode (CAC) integrated three-electrode structure where two cathodes were positioned on two surfaces of a silicon wafer, while one anode was positioned on the sidewalls of the through holes of the silicon wafer. Device design and numerical simulations were conducted to model the functionality of the three-electrode structure in detecting vibration signals with the key geometrical parameters optimized. The CAC integrated three-electrode structure was then manufactured by microfabrication, which demonstrated a simplified fabrication process in comparison with conventional four-electrode structures. Device characterization shows that the sensitivity of the CAC microseismometer was an order of magnitude higher than that of the CME6011 (a commercially available four-electrode electrochemical seismometer), while the noise level was comparable. Furthermore, in response to random vibrations, a high correlation coefficient between the CAC and the CME6011 (0.985) was located, validating the performance of the developed seismometer. Thus, the developed electrochemical microseismometer based on an integrated three-electrode structure may provide a new perspective in seismic observations and resource explorations. |
format | Online Article Text |
id | pubmed-7865234 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2021 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-78652342021-02-07 MEMS-Based Electrochemical Seismometer Relying on a CAC Integrated Three-Electrode Structure She, Xu Wang, Junbo Chen, Deyong Chen, Jian Xu, Chao Qi, Wenjie Liu, Bowen Liang, Tian Sensors (Basel) Article This study developed a MEMS-based electrochemical seismometer relying on a cathode–anode–cathode (CAC) integrated three-electrode structure where two cathodes were positioned on two surfaces of a silicon wafer, while one anode was positioned on the sidewalls of the through holes of the silicon wafer. Device design and numerical simulations were conducted to model the functionality of the three-electrode structure in detecting vibration signals with the key geometrical parameters optimized. The CAC integrated three-electrode structure was then manufactured by microfabrication, which demonstrated a simplified fabrication process in comparison with conventional four-electrode structures. Device characterization shows that the sensitivity of the CAC microseismometer was an order of magnitude higher than that of the CME6011 (a commercially available four-electrode electrochemical seismometer), while the noise level was comparable. Furthermore, in response to random vibrations, a high correlation coefficient between the CAC and the CME6011 (0.985) was located, validating the performance of the developed seismometer. Thus, the developed electrochemical microseismometer based on an integrated three-electrode structure may provide a new perspective in seismic observations and resource explorations. MDPI 2021-01-26 /pmc/articles/PMC7865234/ /pubmed/33530375 http://dx.doi.org/10.3390/s21030809 Text en © 2021 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article She, Xu Wang, Junbo Chen, Deyong Chen, Jian Xu, Chao Qi, Wenjie Liu, Bowen Liang, Tian MEMS-Based Electrochemical Seismometer Relying on a CAC Integrated Three-Electrode Structure |
title | MEMS-Based Electrochemical Seismometer Relying on a CAC Integrated Three-Electrode Structure |
title_full | MEMS-Based Electrochemical Seismometer Relying on a CAC Integrated Three-Electrode Structure |
title_fullStr | MEMS-Based Electrochemical Seismometer Relying on a CAC Integrated Three-Electrode Structure |
title_full_unstemmed | MEMS-Based Electrochemical Seismometer Relying on a CAC Integrated Three-Electrode Structure |
title_short | MEMS-Based Electrochemical Seismometer Relying on a CAC Integrated Three-Electrode Structure |
title_sort | mems-based electrochemical seismometer relying on a cac integrated three-electrode structure |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7865234/ https://www.ncbi.nlm.nih.gov/pubmed/33530375 http://dx.doi.org/10.3390/s21030809 |
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