Cargando…
MEMS-Based Electrochemical Seismometer Relying on a CAC Integrated Three-Electrode Structure
This study developed a MEMS-based electrochemical seismometer relying on a cathode–anode–cathode (CAC) integrated three-electrode structure where two cathodes were positioned on two surfaces of a silicon wafer, while one anode was positioned on the sidewalls of the through holes of the silicon wafer...
| Autores principales: | , , , , , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7865234/ https://www.ncbi.nlm.nih.gov/pubmed/33530375 http://dx.doi.org/10.3390/s21030809 |