Spectroscopic Ellipsometry Characterization of As-Deposited and Annealed Non-Stoichiometric Indium Zinc Tin Oxide Thin Film

A spectroscopic ellipsometry study on as-deposited and annealed non-stoichiometric indium zinc tin oxide thin films of four different compositions prepared by RF magnetron sputtering was conducted. Multi-sample analysis with two sets of samples sputtered onto glass slides and silicon wafers, togethe...

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Detalles Bibliográficos
Autores principales: Janicek, Petr, Putri, Maryane, Kim, Ki Hwan, Lee, Hye Ji, Bouska, Marek, Šlang, Stanislav, Lee, Hee Young
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7865900/
https://www.ncbi.nlm.nih.gov/pubmed/33530567
http://dx.doi.org/10.3390/ma14030578

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7865900/
https://www.ncbi.nlm.nih.gov/pubmed/33530567
http://dx.doi.org/10.3390/ma14030578

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