EUV and Hard X-ray Hartmann Wavefront Sensing for Optical Metrology, Alignment and Phase Imaging

For more than 15 years, Imagine Optic have developed Extreme Ultra Violet (EUV) and X-ray Hartmann wavefront sensors for metrology and imaging applications. These sensors are compatible with a wide range of X-ray sources: from synchrotrons, Free Electron Lasers, laser-driven betatron and plasma-base...

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Autores principales: de La Rochefoucauld, Ombeline, Dovillaire, Guillaume, Harms, Fabrice, Idir, Mourad, Huang, Lei, Levecq, Xavier, Piponnier, Martin, Zeitoun, Philippe
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7865934/
https://www.ncbi.nlm.nih.gov/pubmed/33525501
http://dx.doi.org/10.3390/s21030874
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author de La Rochefoucauld, Ombeline
Dovillaire, Guillaume
Harms, Fabrice
Idir, Mourad
Huang, Lei
Levecq, Xavier
Piponnier, Martin
Zeitoun, Philippe
author_facet de La Rochefoucauld, Ombeline
Dovillaire, Guillaume
Harms, Fabrice
Idir, Mourad
Huang, Lei
Levecq, Xavier
Piponnier, Martin
Zeitoun, Philippe
author_sort de La Rochefoucauld, Ombeline
collection PubMed
description For more than 15 years, Imagine Optic have developed Extreme Ultra Violet (EUV) and X-ray Hartmann wavefront sensors for metrology and imaging applications. These sensors are compatible with a wide range of X-ray sources: from synchrotrons, Free Electron Lasers, laser-driven betatron and plasma-based EUV lasers to High Harmonic Generation. In this paper, we first describe the principle of a Hartmann sensor and give some key parameters to design a high-performance sensor. We also present different applications from metrology (for manual or automatic alignment of optics), to soft X-ray source optimization and X-ray imaging.
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spelling pubmed-78659342021-02-07 EUV and Hard X-ray Hartmann Wavefront Sensing for Optical Metrology, Alignment and Phase Imaging de La Rochefoucauld, Ombeline Dovillaire, Guillaume Harms, Fabrice Idir, Mourad Huang, Lei Levecq, Xavier Piponnier, Martin Zeitoun, Philippe Sensors (Basel) Article For more than 15 years, Imagine Optic have developed Extreme Ultra Violet (EUV) and X-ray Hartmann wavefront sensors for metrology and imaging applications. These sensors are compatible with a wide range of X-ray sources: from synchrotrons, Free Electron Lasers, laser-driven betatron and plasma-based EUV lasers to High Harmonic Generation. In this paper, we first describe the principle of a Hartmann sensor and give some key parameters to design a high-performance sensor. We also present different applications from metrology (for manual or automatic alignment of optics), to soft X-ray source optimization and X-ray imaging. MDPI 2021-01-28 /pmc/articles/PMC7865934/ /pubmed/33525501 http://dx.doi.org/10.3390/s21030874 Text en © 2021 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
de La Rochefoucauld, Ombeline
Dovillaire, Guillaume
Harms, Fabrice
Idir, Mourad
Huang, Lei
Levecq, Xavier
Piponnier, Martin
Zeitoun, Philippe
EUV and Hard X-ray Hartmann Wavefront Sensing for Optical Metrology, Alignment and Phase Imaging
title EUV and Hard X-ray Hartmann Wavefront Sensing for Optical Metrology, Alignment and Phase Imaging
title_full EUV and Hard X-ray Hartmann Wavefront Sensing for Optical Metrology, Alignment and Phase Imaging
title_fullStr EUV and Hard X-ray Hartmann Wavefront Sensing for Optical Metrology, Alignment and Phase Imaging
title_full_unstemmed EUV and Hard X-ray Hartmann Wavefront Sensing for Optical Metrology, Alignment and Phase Imaging
title_short EUV and Hard X-ray Hartmann Wavefront Sensing for Optical Metrology, Alignment and Phase Imaging
title_sort euv and hard x-ray hartmann wavefront sensing for optical metrology, alignment and phase imaging
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7865934/
https://www.ncbi.nlm.nih.gov/pubmed/33525501
http://dx.doi.org/10.3390/s21030874
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