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EUV and Hard X-ray Hartmann Wavefront Sensing for Optical Metrology, Alignment and Phase Imaging

For more than 15 years, Imagine Optic have developed Extreme Ultra Violet (EUV) and X-ray Hartmann wavefront sensors for metrology and imaging applications. These sensors are compatible with a wide range of X-ray sources: from synchrotrons, Free Electron Lasers, laser-driven betatron and plasma-base...

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Detalles Bibliográficos
Autores principales:	de La Rochefoucauld, Ombeline, Dovillaire, Guillaume, Harms, Fabrice, Idir, Mourad, Huang, Lei, Levecq, Xavier, Piponnier, Martin, Zeitoun, Philippe
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7865934/ https://www.ncbi.nlm.nih.gov/pubmed/33525501 http://dx.doi.org/10.3390/s21030874

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